Australia's NANO Sensing Δ 8th of September 2014 Ω 11:15 PM

ΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞ
~ Australian National Fabrication Facility (ANFF) ~ Victorian Node of ANFF ~ ACT Node of AFNN	~ Materials Node of AFNN ~ Semiconductor Nanofabrication Facility of AFNN ~ Queensland Node of AFNN	~ South Australian Node ~ Swinburne University ~ The Victorian Government
~ University of Technology Sydney ~ sense for Ξ ~ sense for Ξ	~ sense for Ξ ~ sense for Ξ ~ sense for Ξ	~ sense for Ξ ~ sense for Ξ ~ sense for Ξ
~ sense for Ξ ~ sense for Ξ ~ sense for Ξ	~ sense for Ξ ~ sense for Ξ ~ sense for Ξ	~ sense for Ξ ~ sense for Ξ ~ sense for Ξ
~ sense for Ξ ~ sense for Ξ ~ sense for Ξ	~ sense for Ξ ~ sense for Ξ ~ sense for Ξ	ξ ξ ξ
«NANO Sensing	Θ	Θ
ΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞΞ

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ Australian National Fabrication Facility (ANFF)

»Australian National Fabrication Facility (ANFF)
ξ established in 2007
ξ under the National Collaborative Research Infrastructure Strategy NCRIS
ξ links 7 university based nodes, with a total of 17 member institutions
ξ a Strategic Advisory Committee, composed of the Node Directors and chaired by the CEO,
ξ advises the Board on trends nationally and internationally with regard to fabrication activities.
ξ an International Advisory committee, chaired by Prof. Jim Williams,
ξ is tasked with making recommendations on the future development of the ANFF beyond the initial program.
ξ The committee will consider the long-term strategic requirements of relevant research disciplines.

select: ~[Σ] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ Victorian Node of ANFF

»Victorian Node of ANFF

Specific capabilities
ξ chemo and bio manipulation of nanostructures (including lithography);
ξ packing of components into functional devices; and
ξ rapid prototyping to design and build devices.

The Victorian node of the ANFF
ξ will provide researchers with access to a broad range of cross-disciplinary fabrication and integration capabilities
ξ comprising a full research product value chain and service compatible with best international practise.

The node is run by a consortium consisting of:
ξ Monash University,
ξ The University of Melbourne,
ξ Deakin University,
ξ LaTrobe University,
ξ Swinburne University,
ξ CSIRO and
ξ the Victorian Government

RMIT is an associate member of the node.
The ANFF headquarters are also based at the node.

Establishment of the node involves two components:
ξ access to existing nano-fabrication research infrastructure at each participating research institution
ξ construction of a new purpose-built facility known as the Melbourne Centre for Nanofabrication,
ξ adjacent to the Monash University campus at Clayton, Victoria.
ξ Activities will be undertaken at participating institutions and
ξ at the new central facility to provide a complete process stream from design through to proof of concept.

Contact Details
ξ Node Director: Dr Abid Khan Email: Abid.Khan@nano.monash.edu Phone: +61 3 9902 0196

Funding Sources
»Victoria
»Department of State and Regional Development
»Queensland's Government
»Goverment of South Australia

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ ACT Node of AFNN

»ACT Node of AFNN

Specific capabilities:
ξ micro/nano fabrication of photonic and related devices;
ξ fabrication of waveguides and photonic crystals; and
ξ MEMS.

The ANFF ACT node comprises facilities at the Australian National University and the University of Western Australia.
ξ These facilities are based on photonic / electronic materials growth,
ξ processing and fabrication of devices including micro electromechanical systems (MEMS).
ξ The node provides a range of capabilities and services for the micro/ nanofabrication of photonic and related devices
ξ as well as the fabrication of waveguides and photonic crystals.

Optoelectronic devices such as semiconductor lasers, photodetectors and modulators
ξ are widely used for communications, data storage and medical applications
ξ photonic crystals, with their ability to confine light and guide and control its propagation,
ξ promise an entire suite of ultra-compact optical devices analogous to those of semiconductor electronics
> it is therefore a key tool in any nanoelectronics research laboratory.

ξ The ANFF NSW node is hosted within the Semiconductor Nanofabrication Facility (SNF) at UNSW.
ξ Established in 1995, the SNF houses clean-room laboratories containing a comprehensive collection of micro-electronic and
ξ nano-electronic process equipment for fabricating an array of silicon (Si) and gallium arsenide (GaAs) devices.
ξ The laboratory currently supports ground-breaking research in
ξ silicon quantum computing,
ξ quantum electronic devices,
ξ medical radiation detectors and
ξ photovoltaics.

ξ The node builds on its existing concentration of EBL systems and expertise in advanced nanoelectronics.
ξ During its 13 years of operation, SNF staff have developed significant knowledge and expertise in EBL process development and advanced lithography tool operation.
ξ The node will offer users the training required to fabricate complete devices, involving complex and advanced process flows.

ARC Centre of Excellence for Quantum Computing Technology, UNSW
ξ The node provides a full device prototyping service including:
ξ device design and conception,
ξ photo-mask design,
ξ photo-mask fabrication (at the Bandwidth Foundry LINK) and process development.

ξ Leading edge nano-photonic and nano-electronic applications demand high-resolution EBL over large areas (millimetres).
ξ The NCRIS program has enabled the purchase of a RAITH-150TWO EBL tool.
ξ This system allows fabrication of nanoscale structures (with feature sizes down to 20nm) over very large areas, up to 400 mm in size.
ξ Examples of structures that can be fabricated using this tool include holographic plates and photonic crystals.
ξ The RAITH-150TWO, together with a number of other essential microfabrication facilities,
ξ will come on-line in new purpose-built class 35 and class 350 clean-rooms in the third quarter of 2008.

ξ NCRIS funding has also enabled the appointment for 3 additional technical staff
ξ with specific expertise in lithography, photo-mask design and semiconductor processing.

Contact Details
ξ Node Director: Prof. Andrew Dzurak Email: a.dzurak@unsw.edu.au Phone: +61 2 9385 6311

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ Queensland Node of AFNN

»Queensland Node of AFNN

Specific capabilities
ξ advanced photoresist synthesis;
ξ functional organic/polymer and bio-inspired nanomaterials synthesis;
ξ bionanodevice fabrication; and
ξ biopolymer processing and nanocomposites.

The ANFF Queensland node provides
ξ a dedicated facility for the synthesis, processing, characterisation and fabrication of functional organics and organic semiconductors,
ξ new generation photoresists,
ξ functional polymers
ξ nanoparticles
ξ bio-inspired nanomaterials,
ξ smart surfaces
ξ microdevices

Services
ξ the scale-up prototyping of devices such as
ξ organic solar cells,
ξ organic light emitting diodes,
ξ organic circuit elements,
ξ microfluidic devices,
ξ bioassay platforms,
ξ biomaterial scaffolds
ξ microbioreactors

The node consists of two facilities
ξ the Soft Materials Processing Facility
ξ the BioNano Device Fabrication Facility
ξ the facilities are based at the University of Queensland
ξ in purpose-built laboratories in the Australian Institute for Bioengineering and Nanotechnology (AIBN) and
ξ the School of Chemistry's Centre for Organic Photonics and Electronics (COPE).

The Australian Institute for Bioengineering and Nanotechnology (AIBN)
ξ is an exciting new research institute
ξ abandons traditional boundaries
ξ focuses research effort into areas that will provide great benefit for
ξ human health, manufacturing, information technology and the environment

The Centre for Organic Photonics and Electronics (COPE)
ξ a joint initiative between the School of Molecular and Microbial Science and
ξ the School of Physical Sciences (Physics Discipline)
ξ includes integrated programs in experimental and theoretical condensed matter physics as well as synthetics chemistry.

Capabilities offered by the node include:
ξ Advanced photoresist synthesis, purification and characterisation
ξ Functional organic / polymer synthesis, purification and characterisation (National Centre for Functional Organic Synthesis)
ξ Functional nanoparticle and bio-inspired nanomaterials synthesis and characterisation
ξ Bionanodevice fabrication and characterisation
ξ Organic electronic device fabrication and testing (OPV, OLED, OFET, OSensors)
ξ Biopolymer processing and nanocomposites

The NCRIS program is enabling significant infrastructure investments including:
ξ A prototyping inkjet printer (Litrex 70), capable of printing organic or aqueous solvent based inks
ξ High-throughput photoresist, monomer, polymer and nanoparticle synthesis units
ξ A semi-automated nanoimprint lithography unit and plasma bonder for surface and device patterning down to ~10 nm
ξ A dip pen lithography unit for micro through to nanometre patterning of surfaces and devices
ξ A deep reactive ion etcher unit for needleless drug delivery patches, nanofluidic devices and surface templating
ξ A state-of-the-art surface and device characterisation suite

Contact Details
ξ Node Director: Prof Justin Cooper-White Email: j.cooperwhite@uq.edu.au Phone: +61 7 3346 3858

Instrumentation Available

Soft Materials Processing Facility
ξ National synthesis facility for functional organics
ξ Glove box with integrated vacuum evaporators
ξ 157 nm F2 laser exposure system
ξ Organic device testing and characterisation
ξ Thermal analysis/characterisation suite; DMA, TGA, DSC
ξ Vibrational spectroscopy suite; FTIR, ATR-FTIR, NIR; Raman
ξ Chromatography suite; GPC (organic and aqueous solvents), HPLC, GC/MS
ξ Electrochemistry
ξ Argon Fluoride (193 nm) laser
ξ Vacuum-Ultraviolet Vase spectroscopic ellipsometer
ξ High throughput synthesis units
ξ Prototyping inkjet printer
ξ Encapsulation instrumentation

BioNano Device Fabrication Facility
ξ UV Mask Aligner
ξ Direct write laser lithography
ξ Hot embossing and lamination
ξ High throughput DNA screening facility
ξ Biomolecular synthesis facility
ξ Biopolymer processing equipment
ξ Polymer fibres and nanocomposites manufacturing facility
ξ Semi-automated nanoimprint lithography unit and plasma bonder
ξ Dip pen lithography unit
ξ Deep reactive ion etcher
ξ Laser scanning cytometry
ξ PicoPlus AFM

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ South Australian Node

»South Australian Node

Specific capabilities:
ξ micro and nano scale patterning;
ξ microfluidic device fabrication

The NCRIS investment in the South Australian node is enabling construction of a major new Microfluidics Fabrication Facility
within The WarkTM at the University of South Australia.
The facility, which will open in mid 2008, will enable the prototyping and replication of channels and networks at the micro-scale.
The new capability will fit closely with the extensive minerals processing and interfacial science research infrastructure at The Wark.

The node will provide access to three main capabilities:

1. Microfluidic Fabrication Facility
ξ for prototyping and replication of channels and networks at the micro-scale
ξ The facility will comprise a dedicated clean room,
ξ equipped for surface preparation and cleaning,
ξ thin film deposition,
ξ micrometer scale photolithography,
ξ etching,
ξ surface characterisation and evaluation.
ξ Applications include lab-on-a-chip (with continuous flow chemical operations and extraction.
ξ Reaction rates 100 to 1000 times faster than during conventional processing),
ξ solvent extraction, pigment processing, genome research, pharmaceutical development and manufacturing.

2. Surface Treatment Facility
ξ for chemical and physical modification using functional molecules
ξ to tailor microfluidic devices and various other surfaces for end user applications.

3. Patterning and Texturing Facility
ξ for patterning and machining of various substrates, including silicon and glass,
ξ The facility will be able to couple lithographic and
ξ direct write techniques depending on end user applications.
ξ Spatially controlled deposition is critical in the fields of fluidic and electric circuitry,
ξ responsive surfaces and other interfaces in advanced manufacturing.

Contact Details
ξ Facility Manager: Dr Dennis Palms Email: dennis.palms@unisa.edu.au Phone: 08 8302 5145
ξ Node Director: Prof. John Ralston Email: john.ralston@unisa.edu.au Phone: 08 8302 3066

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ Swinburne University

»Swinburne University

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ The Victorian Government

»The Victorian Government

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~ University of Sydney

»University of Technology Sydney
»Microstructural Analysis

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~

select: ~[Σ] ~[Ω] ~[Δ]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

~

select: ~[Σ] ~[Ω]!

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~
Small & Smart Inc reserves rights to change this document without any notice
~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~